Semicon Etching Agents
DESCRIPTION
DAIKIN provides etching agents for wet and dry fluorine types for semiconductor manufacturing. For wet etching agents, we provide high quality products in which impurities such as metal-ions, etc., are minimized. We also handle grades with improved permeability and reduced particle adhesion onto wafers by adding a unique surfactant.
GRADES & FEATURES
| Grades | Features | DOWNLOADS |
|---|---|---|
|
Aqueous Hydrofluoric Acid (HF) (50%, 49%) |
High Quality Low impurity level (metal content)
|
TECHNICAL DATA SHEET |
|
Ammonium Fluoride (NH4F) (40%) |
TECHNICAL DATA SHEET | |
|
Buffered Hydrogen Fluoride (BHF) |
TECHNICAL DATA SHEET | |
|
Buffered Hydrogen Fluoride with Surface-active Agent
(BHF-U) |
Improved permeability |
TECHNICAL DATA SHEET |
| Grades | Features | DOWNLOADS |
|---|---|---|
| PFC-14 (CF4) | High-Purity (More than 99.999 %) | TECHNICAL DATA SHEET |
| PFC-116 (C2F6) | TECHNICAL DATA SHEET | |
| PFC-C318 (C4F8) | TECHNICAL DATA SHEET | |
| HFC-23 (CHF3) | TECHNICAL DATA SHEET | |
| HFC-32 (CH2F2) | TECHNICAL DATA SHEET |
Industries
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